Increased Laser Polishing Rates of LPBF Components: High path overlaps to reduce surface features at laser polishing of LPBF components with high process speeds
Increased Laser Polishing Rates of LPBF Components: High path overlaps to reduce surface features at laser polishing of LPBF components with high process speeds
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提高 LPBF 组件的激光抛光速率：高路径重叠可减少以高处理速度进行 LPBF 组件激光抛光时的表面特征
DOI：
10.1002/phvs.202100009
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发表时间：
2021
期刊：
影响因子：
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通讯作者：
Vollertsen, Frank
中科院分区：
文献类型：
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作者：
Beste, Lucas‐H.;Schadewald, Florian;Radel, Tim;Richter, Brodan;Faue, Patrick J.;Pfefferkorn, Frank E.;Vollertsen, Frank
自由曲面光学可以降低先进成像系统的成本、重量和尺寸，但要制造出符合光学公差的复杂旋转不对称表面是一项挑战。为了满足对自由曲面光学的破坏性、高精度子孔径形成和精加工技术的需求，我们研究了一种使用飞秒激光的替代非接触抛光方法，将建模、实验和演示相结合。利用实验验证的激光/锗相互作用双温度模型，研究了飞秒激光对锗的抛光，以指导对激光参数的理解和选择，从而实现近非热烧蚀抛光和图形化。据我们所知，首次成功演示了模型引导的飞秒激光抛光锗，实现了精确的材料去除，同时保持了个位数的纳米光学表面质量。所演示的基于飞秒激光的抛光技术为利用飞秒激光进行半导体光学抛光/制造奠定了基础，并为各种材料的高精度、复杂的子孔径光学抛光任务开辟了可行的途径。©2019美国光学学会根据OSA开放获取出版协议的条款
Freeform optics can reduce the cost, weight, and size of advanced imaging systems, but it is challenging to manufacture the complex rotationally asymmetric surfaces to optical tolerances. To address the need for disruptive, high-precision sub-aperture forming and finishing techniques for freeform optics, we investigate an alternative, non-contact polishing methodology using femtosecond lasers, combining modeling, experiments, and demonstrations. Femtosecondlaser-based polishing of germanium was investigated using an experimentally-validated twotemperature model of laser/germanium interaction to guide the understanding and selection of laser parameters to achieve near-nonthermal ablation for polishing and figuring. For the first time to our knowledge, model-guided femtosecond laser polishing of germanium was successfully demonstrated, achieving precision material removal while maintaining single-digit nanometer optical surface quality. The demonstrated femtosecond-laser-based polishing technique lays the foundation for semiconductor optics polishing/fabrication using femtosecond lasers and opens a viable path for high-precision, complex sub-aperture optical polishing tasks on various materials.© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement