Scanning thermal microscope tip-induced chemical reaction on solid organometallic compound thin films
Scanning thermal microscope tip-induced chemical reaction on solid organometallic compound thin films
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扫描热显微镜尖端诱导固体有机金属化合物薄膜的化学反应
DOI：
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发表时间：
1997
期刊：
影响因子：
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通讯作者：
Sam F. Y. Li
中科院分区：
文献类型：
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作者：
L. Zhou;G. Xu;H. Ng;Sam F. Y. Li
本文首次成功地证明了由电阻热针尖引起的化学反应。随后用扫描热显微镜(SthM)和原子力显微镜对得到的结构进行成像。SthM图像的热导率对比表明，醋酸钯薄膜可以分解为金属钯。通过使用更薄的前体醋酸钯薄膜，所产生的钯金属特征可以向下形成到基片上，并很好地附着在基片上。还研究了控制阻力和针尖扫描速度对结果特征的影响。结果表明，SthM针尖诱导的化学反应在器件制造中具有潜在的应用前景。
This article has successfully demonstrated for the first time a chemical reaction induced by a resistive thermal tip. The resulting structures were subsequently imaged by scanning thermal microscopy (SThM) and atomic force microscopy. The thermal conductivity contrast in SThM images suggested that palladium acetate thin film could be decomposed to palladium metal. The resulting palladium metallic features can form down to the substrate and adhere well on the substrate by using thinner precursor palladium acetate film. The effect of control resistance and tip scan rate on resulting features has also been studied. The results obtained indicate the potential application of SThM tip induced chemical reaction in device fabrication.