Integrated passive wireless pressure and temperature dual-parameter sensor based on LTCC technology
Integrated passive wireless pressure and temperature dual-parameter sensor based on LTCC technology
复制标题
基于LTCC技术的集成无源无线压力温度双参数传感器
DOI：
10.1016/j.ceramint.2018.08.159
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发表时间：
2018-11-01
影响因子：
5.2
通讯作者：
Li, Yongxiang
中科院分区：
文献类型：
--
作者：
Lin, Lin;Ma, Mingsheng;Li, Yongxiang
本文提出了一种基于低温共烧陶瓷（LTCC）技术的无源无线压力和温度集成电感电容（LC）谐振传感器。压力传感部分依赖于传统的空腔电容器。温度传感部分由叉指电容和平面螺旋电感组成。电感线圈的电容和电阻会随着温度的变化而变化。采用本实验室制备的杨氏模量接近65 GPa的LTCC材料来获得较高的压力灵敏度。实验结果表明，所制备的传感器在140-850 kPa、50-500 ℃范围内压力灵敏度为1.16 kHz/kPa，温度灵敏度为0.062% dB/℃。
This paper presents a kind of passive wireless pressure and temperature integrated inductor-capacitor (LC) resonant sensor based on low temperature co-fired ceramic (LTCC) technology. The pressure sensing part is dependent on a traditional cavity capacitor. The temperature sensing part is composed of an interdigital capacitor and a planar spiral inductor. The capacitance and the resistance of inductor coil would change as a response to temperature. The LTCC material with a low Young's modulus of similar to 65 GPa prepared by our laboratory was used to obtain high pressure sensitivity. The experimental results showed that the prepared sensor has a pressure sensitivity of 1.16 kHz/kPa, and a temperature sensitivity of 0.062% dB/degrees C within the range of 140-850 kPa, 50-500 degrees C, respectively.