Fabrication of Impedance Sensor with Hydrophilic Property to Monitor Soil Water Content for Slope Failure Prognostics
Fabrication of Impedance Sensor with Hydrophilic Property to Monitor Soil Water Content for Slope Failure Prognostics
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DOI：
10.18494/sam.2021.3155
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发表时间：
2021-01-01
影响因子：
1.2
通讯作者：
Komatsu, Mitsuru
中科院分区：
文献类型：
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作者：
Futagawa, Masato;Ito, Tatsumi;Komatsu, Mitsuru
为了减少边坡破坏造成的损失，了解山区土壤中含水量的增加是很重要的。本课题组一直在研究用于土壤多点测量的小型化阻抗传感器。具有SiNx顶膜的传统传感器有时无法检测由降雨引起的土壤中的水含量的变化。使用SiOx和SiNx膜进行水滴滑动距离的实验。由于SiOx膜的滑动距离比SiNx膜的滑动距离短，因此证实了SiOx膜比SiNx膜更亲水。为了改善传感器表面和土壤中的自由水之间的接触特性，我们用亲水性SiOx膜覆盖我们的传统传感器芯片。作为接触特性测试，该传感器芯片测量了模型土壤的阻抗。所提出的传感器实现了与土壤中的自由水的稳定接触。而且，芯片是在山坡上长时间运行的。该传感器可以测量响应降雨的接近理论的输出。因此，我们成功地制作了一个稳定的土壤监测传感器与亲水性SiOx膜。
To minimize the damage caused by slope failure, knowledge of the increase in water content in mountain soil is important. Our group has been studying miniaturized impedance sensors for multipoint measurements in soil. Conventional sensors with a SiNx top film sometimes cannot detect changes in the water content in soil resulting from rain. Experiments on the slide distances of water droplets were performed using SiOx and SiNx films. As the slide distance of the SiOx film was shorter than that of the SiNx film, it was confirmed that the SiOx film is more hydrophilic than the SiNx film. To improve contact characteristics between the sensor surface and free water in soil, we covered our conventional sensor chip with a hydrophilic SiOx film. As a contact property test, the sensor chip measured the impedances of model soils. The proposed sensor achieved stable contact with the free water in the soil. Moreover, the chip operated for a long period of time on a mountain slope. The sensor could measure nearly theoretical outputs in response to rainfall. Thus, we succeeded in fabricating a stable soil monitor sensor with a hydrophilic SiOx film.