On-chip interdigitated supercapacitor based on nano-porous gold/manganese oxide nanowires hybrid electrode
On-chip interdigitated supercapacitor based on nano-porous gold/manganese oxide nanowires hybrid electrode
复制标题
基于纳米多孔金/氧化锰纳米线混合电极的片上叉指超级电容器
DOI：
10.1016/j.electacta.2015.02.152
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发表时间：
2015-05-01
影响因子：
6.6
通讯作者：
Hu, Zhiyu
中科院分区：
文献类型：
--
作者：
Zeng, Zhigang;Long, Xiao;Hu, Zhiyu
微电子技术的快速发展对高可靠性、高稳定性、高性能的片上储能器件提出了更高的要求。微制造技术现在已经使得基于各种电极材料的平面超级电容器（SC）能够被制备到芯片上以用于各种应用。具有增强的导电性和电容性能的纳米多孔金属/锰氧化物混合电极已被证明是用于SC的有希望的候选者，但尚未被用于交叉指型片上能量存储。在本文中，我们展示了纳米多孔金/氧化锰纳米线薄膜电极材料的可扩展制备，其可以进一步制造成硅晶片上的片上叉指型全固态超级电容器，使得它们可以与MEMS或CMOS集成。并对氧化锰纳米线在纳米多孔金上的成核和生长机理进行了研究。值得注意的是，基于纳米多孔金/氧化锰纳米线混合材料的小型化SC表现出优异的循环稳定性和上级频率响应（4 ms），并展示出55 μ Wh cm（3）的能量密度和3.4 W cm（3）的功率密度，这与其他基于氧化锰的超级电容器相比相对较高。(C)2015爱思唯尔有限公司版权所有。
The rapid development of micro-sized electronics has aroused demand for on-chip energy storage devices of high reliability, stability and performance. Micro fabrication technology has now enabled planar supercapacitors (SCs), based on various electrode materials, to be prepared onto a chip for a variety of applications. Nano-porous metal/manganese oxide hybrid electrode with enhanced conductivity and capacitive performance has been proven to be a promising candidate for SCs but has not yet been utilized for interdigitated on-chip energy storage. Herein, we demonstrate a scalable preparation of nano-porous gold/manganese oxide nanowires thin film electrode material, which can be further fabricated to on-chip interdigitated all-solid-state supercapacitors on silicon wafers so that they can be integrated with MEMS or CMOS. Also the nucleation and growth mechanism of manganese oxide nanowires on nano-porous gold has been investigated. Remarkably, the miniaturized SCs based on the nano-porous gold/manganese oxide nanowires hybrid material exhibits excellent cycle stability and superior frequency response (4 ms) and demonstrates energy density of 55 mu Wh cm (3) and power density of 3.4 W cm (3), which is relatively high compared with other manganese oxide based supercapacitors. (C) 2015 Elsevier Ltd. All rights reserved.