Pulse energy packing effects on material transport during laser processing of $$<1|1|1>$$ < 1 | 1 | 1 > silicon
Pulse energy packing effects on material transport during laser processing of $$<1|1|1>$$ < 1 | 1 | 1 > silicon
复制标题
激光加工过程中脉冲能量堆积对材料传输的影响 $$<1|1|1>$$ < 1 |
DOI：
10.1007/s00339-017-1415-2
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
Pangovski K
中科院分区：
文献类型：
--
作者：
Pangovski K
利用持续时间为50 ~ 150ns的临时成形脉冲，研究了能量脉冲填充对< 1| 1| 1>硅单脉冲激光加工过程中材料输运的影响。通过一系列脉冲持续时间的能量包装考虑，确定并消除了六种物质传输机制。能量填充已被证明将相互作用转变为能量昂贵的状态，而在深度，材料去除或陨石坑形态和质量方面没有明显的好处。
The effects of energy pulse packing on material transport during single-pulse laser processing of< 1| 1| 1> silicon is studied using temporarily shaped pulses with durations from 50 to 150 ns. Six regimes of material transport were identified and disambiguated through energy packing considerations over a range of pulse durations. Energy packing has been shown to shift the interaction to energetically costlier regimes without appreciable benefit in either depth, material removal or crater morphology and quality.