A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces
A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces
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DOI：
10.1088/0957-0233/17/3/s06
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发表时间：
2006-03-01
影响因子：
2.4
通讯作者：
Ono, T
中科院分区：
文献类型：
--
作者：
Motoki, T;Gao, W;Ono, T
本文介绍了一种用于大规模集成电路电路图形等软金属制成的三维微纳结构表面的纳米压痕测试仪。该仪器可以在垂直方向(Z)和横向(XY)上进行高分辨率的压痕。采用尖端直径为100 nm的电抛光钨探头作为压头。压痕沿Z方向运动由PZT致动器产生。样品安装在钢悬臂的自由端。利用电容式位移传感器测量PZT的位移、悬臂梁的弹性常数和悬臂梁的挠度，可以准确地得到压痕深度和压痕载荷。在扫描电子显微镜的真空室中对铝样品进行了纳米压痕实验。实验结果表明，该仪器具有进行纳米压痕的能力。
This paper presents a nanoindentation instrument for 3D micro/nano-structured surfaces made of soft metals Such as LSI circuit patterns. The instrument call carry Out indentations with hi-h resolution in both the vertical direction (Z) and lateral directions (XY). An electro-polished tungsten probe with a tip diameter of 100 nm is used as the indenter. The indentation motion along, the Z-direction is generated by a PZT actuator. The sample is mounted oil the free-end of a steel cantilever. The indentation depth and load can be accurately obtained from the PZT displacement, cantilever spring constant and the cantilever deflection measured by a capacitance-type displacement sensor. Nanoindentation experiments are carried Out oil an aluminium sample in the vacuum chamber of a scanning electronic microscope. Experimental results demonstrate that the instrument has the ability to perform nanoindentation.