Fundamental limits to force detection using quartz tuning forks

Fundamental limits to force detection using quartz tuning forks
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DOI:
10.1063/1.1150691
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发表时间:
2000-07-01
影响因子:
1.6
通讯作者:
Manus, S
Manus, S
中科院分区:
工程技术4区
文献类型:
--
作者:
Grober, RD;Acimovic, J;Manus, S

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本文探讨了在扫描探针显微镜中使用石英音叉作为力检测器的基本限制。它表明,在室温下,压力和大气中,这些力传感器具有0.62 pN/根Hz的噪声地板,并表现出均方根布朗运动只有0.32 pm。当作为剪切力传感器操作时,在接近样品时检测耗散力和反作用力。这些力足以将探头的运动幅度减小到接近零,而不会物理接触表面。它还表明,传统的比例积分反馈控制产生闭环响应至少比开环响应快40倍。(C)2000年美国物理学会。[S0034-6748(00)02907-5]。
This paper explores the fundamental limits of the use of quartz tuning forks as force detectors in scanned probe microscopy. It is demonstrated that at room temperature, pressure, and atmosphere these force sensors have a noise floor of 0.62 pN/root Hz and exhibit a root mean square Brownian motion of only 0.32 pm. When operated as a shear force sensor both dissipative and reactive forces are detected on approach to the sample. These forces are sufficient to reduce the amplitude of motion of the probe nearly to zero without physically contacting the surface. It is also demonstrated that conventional proportional-integral feedback control yields closed loop responses at least 40 times faster than their open loop response. (C) 2000 American Institute of Physics. [S0034-6748(00)02907-5].