Effect of ultrasonic vibration object on machining performance of wire electrochemical micromachining
Effect of ultrasonic vibration object on machining performance of wire electrochemical micromachining
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DOI：
10.1007/s00170-021-07396-6
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发表时间：
2021-06
期刊：
影响因子：
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通讯作者：
Peng Tengfei;Wang Kan;Li Minghao;Liu Yong
中科院分区：
文献类型：
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作者：
Peng Tengfei;Wang Kan;Li Minghao;Liu Yong
线电解微细加工（WECMM）技术的开发与应用已成为特种加工的研究热点。但由于微细加工间隙的加工产品存在一系列无法消除的问题，导致加工性能不佳。提出了一种新的超声加振丝微细电解加工技术，该技术可以解决极窄间隙微细电解加工中的传质问题。首先，对加工间隙流场进行了数值模拟。结果表明，加入超声振动后，加工间隙的压力范围更大，更有利于电解液的更新。其次，通过实验比较了超声振幅和超声振动对象对加工精度和表面质量的影响，说明随着工件超声振幅的增大，加工性能得到了很大的提高。狭缝宽度从196.2 μm减小到151.2 μm，表面粗糙度从Ra0.863减小到Ra0.259 μm。最后，加工出表面粗糙度Ra为0.263 μm、深宽比为6.7：1的微齿轮结构，证明了UA-WECMM技术是一种制造高深宽比、加工质量好的金属微结构的有效技术。
The development and application of wire electrochemical micromachining (WECMM) technology have become a research hotspot of non-traditional machining. However, a series of problems cannot be eliminated due to the machining products of micromachining gap, which leads to poor machining performance. This paper proposed a new method named ultrasonic vibration–added wire electrochemical micromachining (UA-WECMM) technology, which can solve the mass transfer problem in WECMM with extremely narrow gap. Firstly, the flow field of machining gap was simulated. The results showed that the pressure range of machining gap was larger and was more conducive to the renewal of electrolyte when ultrasonic vibration was added. Secondly, the effects of ultrasonic amplitude and ultrasonic vibration object on machining accuracy and surface quality were compared by experiments, which illustrated that the machining performance was greatly improved with the increase of ultrasonic amplitude of the workpiece. The slit width can be reduced from 196.2 to 151.2 μm, and the surface roughness can be reduced fromRa0.863 toRa0.259 μm. Finally, the micro-gear structure with surface roughness ofRa0.263 μm and depth-to-width ratio of 6.7:1 was fabricated, which proved that UA-WECMM technology is an effective technology for fabricating metal microstructures with high aspect ratio and good machining quality.