Sequential shrink photolithography for plastic microlens arrays
Sequential shrink photolithography for plastic microlens arrays
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DOI：
10.1063/1.3609322
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发表时间：
2011-07-18
影响因子：
4
通讯作者：
Khine, Michelle
中科院分区：
文献类型：
--
作者：
Dyer, David;Shreim, Samir;Khine, Michelle
为了努力利用可收缩聚合物突破微细加工的界限，我们开发了一种顺序收缩光刻工艺。我们证明了这种方法的实用性，通过快速制造塑料微透镜阵列。首先，我们创建一个面具的儿童玩具收缩丁克通过简单的打印点使用标准的桌面打印机。在这种预应力热塑性片材收缩时，点收缩到其原始尺寸的一小部分，然后我们将其光刻转移到涂覆有光刻胶的商品收缩包装膜上。这种收缩膜在短暂加热时面积减少了95%，产生光滑的凸形光致抗蚀剂凸起，最小可达30 μ m。总而言之，这种连续收缩工艺提供了一个完整的工艺来创建微透镜，与原始图案尺寸相比，面积减少了近99%。最后，通过光刻成型步骤，我们将这些凸块制成光学级塑料，例如用于功能微透镜阵列的环烯烃共聚物。(C)2011年美国物理学会。[doi：10.1063/1.3609322]
Endeavoring to push the boundaries of microfabrication with shrinkable polymers, we have developed a sequential shrink photolithography process. We demonstrate the utility of this approach by rapidly fabricating plastic microlens arrays. First, we create a mask out of the children's toy Shrinky Dinks by simply printing dots using a standard desktop printer. Upon retraction of this pre-stressed thermoplastic sheet, the dots shrink to a fraction of their original size, which we then lithographically transfer onto photoresist-coated commodity shrink wrap film. This shrink film reduces in area by 95% when briefly heated, creating smooth convex photoresist bumps down to 30 mu m. Taken together, this sequential shrink process provides a complete process to create microlenses, with an almost 99% reduction in area from the original pattern size. Finally, with a lithography molding step, we emboss these bumps into optical grade plastics such as cyclic olefin copolymer for functional microlens arrays. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3609322]