Miniaturized interferometric 3-D shape sensor using coherent fiber bundles
Miniaturized interferometric 3-D shape sensor using coherent fiber bundles
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DOI：
10.1016/j.optlaseng.2018.04.011
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发表时间：
2018-08
影响因子：
4.6
通讯作者：
Haoyang Zhang;R. Kuschmierz;J. Czarske
中科院分区：
文献类型：
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作者：
Haoyang Zhang;R. Kuschmierz;J. Czarske
基于马赫-曾德干涉仪的传感器可同时测量距离和速度，可对旋转工件（例如切削车床）进行绝对 3D 形状测量。然而，由于散斑效应和温度漂移，可实现的形状不确定性仅限于一微米左右。本文研究了一种具有相位评估功能的激光多普勒距离传感器（P-LDD 传感器）以及基于相机的散射光检测。实现了一种新颖的散斑分离技术和原位条纹距离校准方法，以降低测量不确定度。采用相干光纤束将散射光转发至相机。这使得紧凑型无源传感器头能够通过锁孔进入。与基于光电探测器的传感器相比，基于相机的设置可以将测量不确定度降低一个数量级。因此，绝对 3D 形状测量的总形状不确定度可降低至约 100 nm。
Mach-Zehnder interferometer based sensors for simultaneous distance and velocity measurement allow for absolute 3-D shape measurements of rotating workpieces for instance in cutting lathes. The achievable shape uncertainty is limited to around one micron due to the speckle effect and temperature drifts, however. In this paper, a laser Doppler distance sensor with phase evaluation (P-LDD sensor) with a camera based scattered light detection is investigated. A novel speckle separation technique and in-situ fringe distance calibration method are realized to reduce the measurement uncertainty. A coherent fiber bundle is employed to forward the scattered light towards the camera. This enables a compact and passive sensor head with keyhole access. Compared with a photo detector based sensor, the camera based setup allows to decrease the measurement uncertainty by the order of one magnitude. As a result, the total shape uncertainty of absolute 3-D shape measurements can be reduced to about 100 nm.