Improvement of Hydrophilic Stability of Diamond-Like Carbon Films by O2/CF4 Plasma Post-Treatment
Improvement of Hydrophilic Stability of Diamond-Like Carbon Films by O2/CF4 Plasma Post-Treatment
复制标题
DOI：
10.4028/www.scientific.net/amr.1125.38
复制
发表时间：
2015-10
期刊：
影响因子：
--
通讯作者：
C. Jongwannasiri;S. Watanabe
中科院分区：
文献类型：
--
作者：
C. Jongwannasiri;S. Watanabe
在这篇文章中，从研究中获得的结果进行了等离子体后处理的类金刚石碳（DLC）膜使用氧气/四氟甲烷（O2/CF 4）的气体混合物的报告。采用原子力显微镜（AFM）和衰减全反射-傅里叶变换红外（ATR-FTIR）光谱对等离子体后处理前后薄膜的表面形貌和化学键合进行了表征。还使用接触角测量研究了向O2等离子体中添加CF 4对膜的润湿性的影响。结果表明，在O2等离子体中加入CF 4后，DLC膜的表面粗糙度增加，而O2/CF 4等离子体处理后，DLC膜表面生成了含氧和含氟官能团。表面能也随着CF 4分数的增加而降低，导致膜的表面是疏水的。此外，含有20%CF4的膜表现出更高的亲水稳定性比其他。因此，在O2等离子体中加入少量的CF 4可以被认为有利于改善DLC膜表面的亲水稳定性。
In this article, the results obtained from a study carried out on the plasma post-treatment of diamond-like carbon (DLC) films using an oxygen/tetrafluoromethane (O2/CF4) gas mixture is reported. The surface morphology and chemical bonding of the films before and after the plasma post-treatment were characterized using atomic force microscopy (AFM) and attenuated total reflectance-Fourier transform infrared (ATR-FTIR) spectroscopy. The effect of adding CF4 to the O2 plasma on the wettability of the films was also examined using contact angle measurements. The results indicate that the surface roughness increased with the addition of CF4 to the O2 plasma, whereas oxygen-and fluorinated-based functional groups were generated on the surface of the DLC films submitted to O2/CF4 plasma post-treatment. The surface energy also decreased with increasing CF4 fraction, causing the surface of the films to be hydrophobic. Furthermore, the films containing 20% CF4 exhibited higher hydrophilic stability than the others. Thus, the addition of a small amount of CF4 to O2 plasma can be considered beneficial in improving the hydrophilic stability of surface of DLC films.