Versatile route to gapless microlens arrays using laser-tunable wet-etched curved surfaces
Versatile route to gapless microlens arrays using laser-tunable wet-etched curved surfaces
复制标题
使用激光可调湿法蚀刻曲面实现无间隙微透镜阵列的多功能途径
DOI：
10.1364/oe.20.012939
复制
发表时间：
2012-06-04
期刊：
影响因子：
3.8
通讯作者：
Hou, Xun
中科院分区：
文献类型：
--
作者：
Hao, Bian;Liu, Hewei;Hou, Xun
这项工作揭示了一个成本效益和灵活的方法，以各种微透镜阵列的聚合物，这是必不可少的微光学元件。采用800 nm飞秒激光控制氢氟酸对石英玻璃的刻蚀过程，制备出表面光滑的凹面微结构。然后，微结构化玻璃模板可以用作用于在聚合物上复制微透镜的模具。本文在聚二甲基硅氧烷（PDMS）上制备了一个包含16,000多个六边形透镜的高有序微透镜阵列，并展示了其良好的聚光能力和成像性能。通过成功地制备了几种其它方法难以获得的不同图案的凹模，证明了该方法的灵活性。该技术为制备小尺度、光滑曲面提供了一条新的途径，在微光学、生化分析、超疏水界面等领域有着广泛的应用。(C)2012美国光学学会
This work reveals a cost-efficient and flexible approach to various microlens arrays on polymers, which is essential to micro-optics elements. An 800-nm femtosecond laser is employed to control the hydrofluoric (HF) acid etching process on silica glasses, and concave microstructures with smooth curved surfaces are produced by this method. Then, the micro-structured glass templates can serve as molds for replicating microlenses on polymers. In this paper, a high-ordered microlens array with over 16,000 hexagonal-shaped lenses is fabricated on poly (dimethyl siloxane) [PDMS], and its perfect light-gathering ability and imaging performance are demonstrated. The flexibility of this method is demonstrated by successful preparation of several concave molds with different patterns which are difficult to be obtained by other methods. This technique provides a new route to small-scaled, smooth and curved surfaces which is widely used in micro-optics, biochemical analysis and superhydrophobic interface. (C) 2012 Optical Society of America