Single-Grain TFTs on Location-Controlled Crystal Grains Formed by Excimer Laser Crystallization of Si Thin Films

Single-Grain TFTs on Location-Controlled Crystal Grains Formed by Excimer Laser Crystallization of Si Thin Films
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准分子激光结晶硅薄膜形成的位置控制晶粒上的单晶 TFT

DOI:
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发表时间:
2004
期刊:
Tech.Dig.Int.Electron Devices Meeting
影响因子:
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通讯作者:
Tanemasa Asano
Tanemasa Asano
中科院分区:
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文献类型:
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作者:
Hideya Kumomi;Chihiro Shin;Gou Nakagawa;Tanemasa Asano

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