Tensile properties and fatigue crack growth in LIGA nickel MEMS structures
Tensile properties and fatigue crack growth in LIGA nickel MEMS structures
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DOI：
10.1016/j.msea.2005.06.044
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发表时间：
2005-10
期刊：
影响因子：
6.4
通讯作者：
D. Son;Jong-jin Kim;Juyoung Kim;D. Kwon
中科院分区：
文献类型：
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作者：
D. Son;Jong-jin Kim;Juyoung Kim;D. Kwon
利用微拉伸/疲劳试验装置对LIGA（Lithographie，Galvanformung，Abformung）镍微机电系统（MEMS）结构的拉伸和疲劳性能进行了研究。样品的特征尺寸为10μm。微拉伸试验得到的应力-应变结果显示比较脆，和极限拉伸强度的变化解释了试样的几何形状。通过拉-拉疲劳试验测定了应力-循环曲线。用缺口敏感因子讨论了缺口对疲劳的影响。用卸载柔度法测量了裂纹扩展速率，得到了巴黎参数。在不同的应力强度因子的裂纹扩展速率预测的周期失效与测量值进行了比较。
The tensile and fatigue properties of LIGA (Lithographie, Galvanformung, Abformung) nickel microelectromechanical systems (MEMS) structures were evaluated using a microtensile/fatigue device. The feature size of the specimens was 10μm. The stress–strain results obtained by microtensile tests showed comparatively brittle, and the variation in ultimate tensile strength was explained by the specimen geometry. Stress–cycle curves were also measured by tension–tension fatigue tests. The notch effect on fatigue was discussed in terms of notch-sensitivity factor. Crack propagation rates were measured by the unloading compliance method and the Paris parameter was obtained. The cycles to failure predicted from the crack propagation rate at various stress intensity factors were compared with the measured values.