Composition and structure characterization of aluminum after laser ablation
Composition and structure characterization of aluminum after laser ablation
复制标题
DOI：
10.1016/j.mseb.2006.08.042
复制
发表时间：
2006-11-25
期刊：
影响因子：
--
通讯作者：
Sabotinov, N.
中科院分区：
文献类型：
--
作者：
Balchev, I.;Minkovski, N.;Sabotinov, N.
用X射线光电子能谱(XPS)和扫描电子显微镜(SEM)研究了激光能量为5.3~11.1J/cm(2)、扫描速度为20~100 mm/S的溴化铜激光烧蚀铝表面的过程。扫描电子显微镜分析表明，激光处理后的表面具有多孔结构，并形成了微米和纳米级的颗粒。在Ar气氛中形成的团聚体尺寸较小。在Ar气氛中辐照后，铝纳米粒子以金属状态形成，在空气中暴露于0，其表面被氧化。然而，在空气中有两种可能的机制，第一种与在Ar下相同，第二种直接在等离子体中发生。Al_2P(74.0 eV)和O_1S(531.4 eV)峰的结合能和O/Al比提供了Al_2O_3和Al_2O_3中铝的存在和表面氧化的信息。扫描电子显微镜观察表明，氧化层为多孔结构。(C)2006爱思唯尔B.V.保留所有权利。
The process of laser ablation of an aluminum surface with copper bromide laser (511 nm) was investigated by X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM), with the laser fluence varying from 5.3 to 11.1 J/cm(2) and the laser beam scanning velocity from 20 to 100 mm/s. The experiments were done in two kinds of ambient atmosphere: air and argon. SEM analysis showed the porous structure of the laser treated surface and formation of micro- and nano-sized particles. The dimensions of the agglomerates formed were smaller in argon atmosphere. Upon irradiation in Ar atmosphere the aluminum nanoparticles were formed in a metal state and their surface was oxidized after exposure to 0, in air. However, two mechanisms are possible in air, the first one being the same as under Ar and the second occurring direct in the plasma. The binding energies of the Al2p (74.0 eV) and O 1s (531.4 eV) peaks and the O/Al ratio give information on the oxidation of the surface and presence of aluminum in Al2O3 and AlOOH. The oxide layer was porous, which was evidenced by SEM. (c) 2006 Elsevier B.V. All rights reserved.