High-Speed and Large-Amplitude Resonant Varifocal Mirror
High-Speed and Large-Amplitude Resonant Varifocal Mirror
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DOI：
10.20965/jrm.2020.p0344
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发表时间：
2020-04
期刊：
影响因子：
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通讯作者：
Takashi Sasaki;Takuro Kamada;K. Hane
中科院分区：
文献类型：
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作者：
Takashi Sasaki;Takuro Kamada;K. Hane
我们为反射式聚焦扫描光学元件设计、制造和测量高速共振式变焦反射镜。研究了由静电驱动器驱动的圆周支撑型反射镜和直径为1 mm的节点支撑型反射镜。在节点支撑型中，与圆周支撑型相比，获得了更大的幅度。制作的反射镜可以在大约450 kHz的频率下进行轴对称变形。当外加总电压为150V时，焦距为±28 mm。
We design, fabricate, and measure high-speed resonant varifocal mirrors for a reflective type focus scanning optical element. A circumference supported type mirror and a node supported type mirror with a 1 mm diameter driven by an electrostatic actuator are investigated. In the node supported type, a larger amplitude compared to that of the circumference supported type was obtained. The fabricated mirror could operate at approximately 450 kHz with axisymmetric deformation. The focal length was calculated to be ±28 mm at an applied total voltage amplitude of 150 V.