Deposition and characterization of Pb(Zr, Ti)O3 sol-gel thin films for piezoelectric cantilever beams
Deposition and characterization of Pb(Zr, Ti)O3 sol-gel thin films for piezoelectric cantilever beams
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DOI：
10.1088/0964-1726/16/1/011
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发表时间：
2007-02-01
影响因子：
4.1
通讯作者：
Cui, Tianhong
中科院分区：
文献类型：
--
作者：
Liu, Mengwei;Wang, Jing;Cui, Tianhong
采用溶胶-凝胶法在Pt（111）/Ti/SiO2/Si（100）衬底上制备了不同厚度的PZT薄膜。本文提出了一种在一次退火过程中通过改变PZT薄膜的涂层来控制PZT薄膜晶体取向的新方法。采用多涂层退火和单涂层退火的溶胶-凝胶法分别制备了具有（111）和（100）择优取向的PZT薄膜。通过分析PZT前驱体溶液的相变，得到了200和600 ℃的最佳焙烧和退火温度。研究了薄膜厚度对PZT薄膜的微观结构、晶相和电学性能的影响。与多涂层退火方法相比，单涂层退火方法降低了PZT薄膜的残余应力。随着PZT薄膜厚度的增加，反射极化增强。经1.6 μ m单层退火的PZT薄膜的反射极化（Pr）和矫顽场（Ec）分别为25.7 μ C cm（-2）和59.2kV cm（-1）。设计了两个PZT压电元件和三个电极的新型微悬臂梁。这些结构可应用于微传感器、微致动器或具有感测和致动功能的通用装置。采用干湿结合体微机械加工技术成功地制备了悬臂梁。
PZT thin films of various thickness were deposited on Pt(111)/Ti/SiO2/Si(100) substrates by the sol-gel method. A new method to control the crystallographic orientation of the PZT thin films by modifying the coating layers in one annealing cycle is presented in this paper. PZT films with ( 111) and ( 100) preferred orientation were obtained using the multi-coating-layer-annealed and the one-coating-layer-annealed sol-gel methods, respectively. The optimized baking and annealing temperatures at 200 and 600 degrees C were obtained by analyzing the phase transformation of the PZT precursor solution. The effect of film thickness on the microstructures, crystalline phases, and electrical properties of the PZT films was investigated. Compared to the multi-coating-layer-annealed method, the one-coating-layer-annealed method decreases the residual stress of the PZT films. The remanent polarization increases with the thickness of the PZT films. The remanent polarization (P-r) and coercive fields (E-c) of the one-coating-layer-annealed PZT films with 1.6 mu m thickness are 25.7 mu C cm(-2) and 59.2 kV cm(-1), respectively. New microcantilevers with two PZT piezoelectric elements and three electric electrodes were designed. These structures can be applied to microsensors, microactuators, or versatile devices having both sensing and actuating functions. The cantilevers were successfully fabricated with wet and dry combined bulk micromachining technique.