Development of piezoelectric actuators for active X-ray optics
Development of piezoelectric actuators for active X-ray optics
复制标题
DOI：
10.1007/s10832-009-9566-y
复制
发表时间：
2011-08
影响因子：
1.7
通讯作者：
Dou Zhang;D. Rodriguez-Sanmartin;T. Button;C. Atkins;D. Brooks;P. Doel;C. Dunare;C. Feldman;A. James;A. Michette;W. Parkes;S. Pfauntsch;Shahin Sahraei;T. Stevenson;Hongchang Wang;R. Willingale
中科院分区：
文献类型：
--
作者：
Dou Zhang;D. Rodriguez-Sanmartin;T. Button;C. Atkins;D. Brooks;P. Doel;C. Dunare;C. Feldman;A. James;A. Michette;W. Parkes;S. Pfauntsch;Shahin Sahraei;T. Stevenson;Hongchang Wang;R. Willingale
压电致动器广泛应用于自适应光学中，通过减少快速变化的光学失真的影响，使反射镜具有主动受控的反射表面以用于波前校正。两个新的原型自适应X射线光学系统正在研制中，目的是接近基本衍射极限。一种建议的技术是微结构光学阵列(MOA)，它包括两个或四个压电条粘结到硅片上以产生用于生物应用的微聚焦X射线源，并通过使用深硅腐蚀获得的连续对准的通道阵列使用掠入射反射。另一项技术是大规模光学，它使用薄壳反射镜，由20-40个压电致动器粘合在一起，用于下一代X射线望远镜，目的是获得比钱德拉目前可用的分辨率(0.5英寸)更高的分辨率。根据所提议的镜面和阵列结构的设计和实施，本方案正在开发基于PZT的压电致动器。材料系统的制备选择了粘塑性加工，然后将其成形并成形为合适的构型。对厚度、表面光洁度和曲率的精确控制是提供满意的执行器的关键因素。提出了单晶片压电致动器的应用方案，并给出了这类压电致动器的制作和特性，以及相关的设计概念和与建模工作的比较。
Piezoelectric actuators are widely utilised in adaptive optics to enable mirrors having an actively controlled reflective surface for the purpose of the wavefront correction by reducing the effects of rapidly changing optical distortion. Two new prototype adaptive X-ray optical systems are under development with the aim of approaching the fundamental diffraction limit. One proposed technology is microstructured optical arrays (MOAs) involving two or four piezoelectric strips bonded to a silicon wafer to produce a micro-focused X-ray source for biological applications, and which uses grazing incidence reflection through consecutive aligned arrays of channels obtained using deep silicon etching. Another technology is large scale optics which uses a thin shell mirror bonded with 20–40 piezoelectric actuators for the next generation of X-ray telescopes with an aim to achieve a resolution greater than that currently available by Chandra (0.5"). PZT-based piezoelectric actuators are being developed in this programme according to the design and implementation of the proposed mirror and array structures. Viscous plastic processing is chosen for the preparation of the materials system, which is subsequently formed and shaped into the suitable configurations. Precise controls on the thickness, surface finish and the curvature are the key factors to delivering satisfactory actuators. Unimorph type piezoelectric actuators have been proposed for the applications and results are presented regarding the fabrication and characterisation of such piezo-actuators, as well as the related design concepts and comparison to modelling work.