Ordering Pathway of Block Copolymers under Dynamic Thermal Gradients Studied by in Situ GISAXS
Ordering Pathway of Block Copolymers under Dynamic Thermal Gradients Studied by in Situ GISAXS
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DOI：
10.1021/acs.macromol.6b01555
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发表时间：
2016-10
期刊：
影响因子：
5.5
通讯作者：
Saumil Samant;J. Strzalka;K. Yager;K. Kisslinger;Danielle Grolman;Monali Basutkar;N. Salunke;Gurpreet Singh;Brian C. Berry;A. Karim
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文献类型：
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作者：
Saumil Samant;J. Strzalka;K. Yager;K. Kisslinger;Danielle Grolman;Monali Basutkar;N. Salunke;Gurpreet Singh;Brian C. Berry;A. Karim
基于动态温度梯度的嵌段共聚(BCP)薄膜定向自组装技术，如冷区退火法(CZA)，在快速制备高度有序的BCP结构域图案方面具有很大的潜力。作为演示，在1μm厚的圆柱形PS-b-PMMA(CBCP)薄膜中，通过在最佳样品扫描速率下施加尖锐的温度梯度(CZA-SHARP)，实现了六方堆积的主要垂直圆柱形形貌，这在技术上与膜和光刻等应用相关。深入了解了这种CZA-S工艺中BCP有序化的分子水平机理和途径，有助于充分挖掘CZA-S在大规模BCP器件制造中的潜力。为此，我们开发了定制的CZA-S组件，利用掠入射SMA原位研究了PS-b-PMMA CBCP薄膜在经历CZA-S过程中的动态结构演变和有序性。
Dynamic thermal gradient-based processes for directed self-assembly of block copolymer (BCP) thin films such as cold zone annealing (CZA) have demonstrated much potential for rapidly fabricating highly ordered patterns of BCP domains with facile orientation control. As a demonstration, hexagonally packed predominantly vertical cylindrical morphology, technologically relevant for applications such as membranes and lithography, was achieved in 1 μm thick cylinder-forming PS-b-PMMA (cBCP) films by applying sharp thermal gradients (CZA-Sharp) at optimum sample sweep rates. A thorough understanding of the molecular level mechanisms and pathways of the BCP ordering that occur during this CZA-S process is presented, useful to fully exploit the potential of CZA-S for large-scale BCP-based device fabrication. To that end, we developed a customized CZA-S assembly to probe the dynamic structure evolution and ordering of the PS-b-PMMA cBCP film in situ as it undergoes the CZA-S process using the grazing incidence sma...