Hardness measurements of Ar^+-beam treated polyimide by depth-sensing ultra low load indentation
Hardness measurements of Ar^+-beam treated polyimide by depth-sensing ultra low load indentation
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DOI：
10.1557/jmr.1993.0377
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发表时间：
1993-02
影响因子：
2.7
通讯作者：
Eal H. Lee;Y. Lee;Warren C. Oliver;L. Mansur
中科院分区：
文献类型：
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作者：
Eal H. Lee;Y. Lee;Warren C. Oliver;L. Mansur
在室温下，用1 MeV的Ar离子注入4 7×10 15 cm−2的聚酰亚胺Kapton和自旋浇铸聚酰胺酸(PAA)在蓝宝石表面。用深度传感低载荷压痕技术对原始表面和植入表面的性能进行了表征。通过实验研究了基片、压痕速率、松弛和压痕工艺对材料性能的影响。结果表明：(1)硬度随压痕深度的增加而降低；(2)以未处理材料为衬底的离子束硬化表面的测量低估了硬度，而在蓝宝石衬底上的测量高估了硬度；(3)加载/卸载速率的影响在加载位移结果中很明显；(4)用力调制技术测得的硬度值与深度的相关性很小。100 nm深度的硬度值用于比较，因为该深度的硬度值几乎与衬底、压痕速率和压痕方法无关。用本文描述的技术测量的Kapton硬度在Ar注入后增加了30倍以上，在100 nm压痕深度下从0.43 Gpa增加到13 Gpa。聚酰胺酸的硬度也有类似的增加。这一结果表明，旋转浇注PAA膜可能在要求硬度和耐磨性的防护涂层中具有潜在的技术应用。
Polyimide Kapton and spin-cast polyamic acid (PAA) on sapphire have been implanted with 1 MeV Ar ions to a dose of 4.7 × 10^15 cm^−2 at ambient temperature. The properties of both pristine and implanted surfaces were characterized by a depth-sensing low-load indentation technique. Experiments were carried out to investigate the effects of substrate, indentation rate, relaxation, and indentation technique. The results showed that (1) hardness was depth-dependent and decreased with increasing indentation depth, (2) measurements of the ion beam hardened surface with the untreated material as a substrate underestimated the hardness while measurements over the sapphire substrate overestimated it, (3) the effects of loading/unloading rates were apparent in the load displacement results, and (4) hardness values measured using the force modulation technique showed very little depth dependence. The hardness value at 100 nm depth is used for comparison purposes since the hardness value at this depth was almost independent of substrate, indentation rate, and indentation method. The hardness of Kapton, which was measured using the techniques described herein, was increased by over 30 times after Ar implantation, from 0.43 to 13 GPa at 100 nm indentation depth. A similar increase in hardness was also observed for polyamic acid. This result suggests that spin-cast PAA film may have potential technological applications for protective coatings where hardness and wear resistance are required.