Capacitive position measurement for high-precision space inertial sensor
Capacitive position measurement for high-precision space inertial sensor
复制标题
高精度空间惯性传感器电容式位置测量
DOI:
10.1007/s11467-009-0019-5
复制
发表时间:
2009-06-01
影响因子:
--
通讯作者:
Luo, Jun
中科院分区:
文献类型:
--
作者:
Bai, Yan-zheng;Zhou, Ze-bing;Luo, Jun
Low noise position measurement is fundamental for space inertial sensors, and at present the capacitive position sensor is widely employed for space inertial sensors. The design for the possible suppression of the front-end electric noises for a capacitive sensor is presented. A prototype capacitive sensor with 2×10−6pF/Hz1/2at frequency above 0.04 Hz is achieved and further improvements are discussed.