Micropatterning of Sol-Gel Derived Thin Films Using Hydrophobic-Hydrophilic Patterned Surface
Micropatterning of Sol-Gel Derived Thin Films Using Hydrophobic-Hydrophilic Patterned Surface
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DOI：
10.1023/b:jsst.0000048007.43110.fa
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发表时间：
2004-08
影响因子：
2.5
通讯作者：
K. Tadanaga;T. Fujii;A. Matsuda;T. Minami;M. Tatsumisago
中科院分区：
文献类型：
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作者：
K. Tadanaga;T. Fujii;A. Matsuda;T. Minami;M. Tatsumisago
研究了利用疏水-亲水图案化表面形成凸形氧化物微图案的过程，并将该技术应用于SnO 2、ZrO 2、TiO 2和Al 2 O3等氧化物薄膜。通过选择性紫外光照射的双层薄膜的一个非常薄的TiO 2凝胶膜作为底层和水解的氟烷基三甲氧基硅烷层作为顶层的玻璃基板上制备的疏水-亲水图案化表面。然后将前体溶液旋涂在疏水-亲水图案上，并在室温下干燥涂覆的基底。氧化物的微图案是很难从金属醇盐作为前体溶液形成在疏水-亲水图案化表面上，但凸形的微图案形成在图案的亲水区域上，当使用金属氯化物或氯氧化物作为起始材料时。这种图案化技术潜在地具有各种各样的应用，诸如微光学元件和精细图案化的透明电极的制造。
Formation process of convexly shaped oxide micropatterns using hydrophobic-hydrophilic patterned surface has been examined, and this technique was applied to several oxide thin films such as SnO2, ZrO2, TiO2and Al2O3. Hydrophobic-hydrophilic patterned surfaces were prepared on glass substrates by selective UV irradiation through a photomask on double-layered films of a very thin TiO2gel film as the underlayer and a hydrolyzed fluoroalkyltrimethoxysilane layer as the top layer. Precursor solutions were then spin-coated on the hydrophobic-hydrophilic patterns, and the coated substrates were dried at room temperature. The micropatterns of oxides were very difficult to be formed on the hydrophobic-hydrophilic patterned surfaces from metal-alkoxides as a precursor solution, but convexly shaped micropatterns were formed on the hydrophilic regions of the pattern when metal chlorides or oxychlorides were used as starting materials. This patterning technique potentially has a wide variety of applications such as fabrication of micro-optical components and finely patterned transparent electrodes.