Flexible, fast, and low-cost production process for polymer based diffractive optics
Flexible, fast, and low-cost production process for polymer based diffractive optics
复制标题
DOI：
10.1364/oe.23.003614
复制
发表时间：
2015-02-09
期刊：
影响因子：
3.8
通讯作者：
Roth, Bernhard
中科院分区：
文献类型：
--
作者：
Rahlves, Maik;Rezem, Maher;Roth, Bernhard
衍射光学元件的产生通常需要时间和成本消耗的生产技术，例如光刻。特别是在研究和开发中，需要小系列的衍射微结构，并且需要灵活且成本有效的制造技术，以使得能够在短时间尺度上制造多功能光学元件。在这项工作中，我们介绍了一种新的工艺链制造的衍射光学元件在各种聚合物。它基于无掩模光刻工艺步骤，其中计算机生成的光学元件图像通过数字反射镜设备和显微镜设置投影到涂有光敏抗蚀剂的硅晶片上。此外，缝合工艺允许我们在晶圆上大面积微结构化。显影后，由聚二甲基硅氧烷制成微结构的软印模，其用作随后的热压工艺的模具，其中最终的衍射光学元件被复制到热塑性聚合物中。实验结果表明，该过程的适用性。(C)2015美国光学学会
The generation of diffractive optical elements often requires time and cost consuming production techniques such as photolithography. Especially in research and development, small series of diffractive microstructures are needed and flexible and cost effective fabrication techniques are desirable to enable the fabrication of versatile optical elements on a short time scale. In this work, we introduce a novel process chain for fabrication of diffractive optical elements in various polymers. It is based on a maskless lithography process step, where a computer generated image of the optical element is projected via a digital mirror device and a microscope setup onto a silicon wafer coated with photosensitive resist. In addition, a stitching process allows us to microstructure a large area on the wafer. After development, a soft stamp of the microstructure is made from Polydimethylsiloxane, which is used as a mold for the subsequent hot embossing process, where the final diffractive optical element is replicated into thermoplastic polymer. Experimental results are presented, which demonstrate the applicability of the process. (C) 2015 Optical Society of America