Comparison between pulsed laser and ion irradiation of hydrogenated amorphous carbon films
Comparison between pulsed laser and ion irradiation of hydrogenated amorphous carbon films
复制标题
DOI：
10.1002/sia.7402201110
复制
发表时间：
1994-07
影响因子：
1.7
通讯作者：
G. Compagnini;R. Reitano
中科院分区：
文献类型：
--
作者：
G. Compagnini;R. Reitano
在室温下用离子束和激光脉冲辐照氢化非晶碳薄膜。用300 keV Ar+离子以约1 μA cm−2的电流密度进行离子照射，平均密度释放约为1024-1025 eV cm−3，而用红宝石激光器（0.694 μm）以0.1-1.2 J cm−2的能量流进行激光照射，能量释放约为1022 eV cm−3。通过1-6 eV范围内的光学测量和CC伸缩模式（1000-2000 cm-1）区域内的拉曼光谱研究了辐照层的电子和原子结构。结果发现，激光照射显示出更强的效率相对于离子束轰击在膜结构的修改。此外，拉曼光谱显示，随着沉积在样品内部的能量的增加，三角形碳组分相对于四面体碳组分逐渐增长。离子和光子的能量释放机制和热过程的比较之间的差异进行了讨论，在与样品的分子成分的主要相互作用。
Hydrogenated amorphous carbon films were irradiated at room temperature both with ion beams and laser pulses. Ion irradiation was performed with 300 keV Ar+ ions at current densities of about 1 μA cm−2 and the average density release was of about 1024–1025 eV cm−3, while laser irradiation was performed with a Ruby laser (0.694 μm) with an energy flow of 0.1–1.2 J cm−2 and an energy release of about 1022 eV cm−3. The electronic and atomic structure of irradiated layers were investigated by optical measurements in the range 1–6 eV and Raman spectroscopy in the region of CC stretching modes (1000–2000 cm−1). It was found that laser irradiation shows a stronger efficiency with respect to ion beam bombardment in the modification of the film structure. Moreover Raman spectroscopy shows a progressive growth of the trigonal carbon component with respect to the tetrahedral one with increasing energy deposited inside the sample. The differences between ion and photon energy release mechanisms and a comparison with thermal processes are discussed in terms of primary interaction with the molecular constituents of the samples.