Characterization of ion emission of an extreme ultraviolet generating discharge produced Sn plasma
Characterization of ion emission of an extreme ultraviolet generating discharge produced Sn plasma
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DOI：
10.1063/1.3268462
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发表时间：
2010-01
影响因子：
3.2
通讯作者：
K. Gielissen;Y. Sidelnikov;D. Glushkov;W. Soer;V. Banine;van der J.J.A.M. Mullen
中科院分区：
文献类型：
--
作者：
K. Gielissen;Y. Sidelnikov;D. Glushkov;W. Soer;V. Banine;van der J.J.A.M. Mullen
结合使用不同的飞行时间技术的Sn基放电产生的极紫外产生等离子体的离子发射的特征。采用静电离子谱仪测量发射的Sn离子的平均电荷分布。一个专用的法拉第杯配置被用来测量总离子通量从源不同的放电能量。等离子体发射的高能锡离子的能量高达100 keV已被确定。对于进入等离子体的更高的电输入能量，高能离子的数量增加，而与膨胀的等离子体离子相关联的信号不显示这种依赖性。大量的检测到的离子的离子能量分布计算的基础上的法拉第杯测量和理论等离子体膨胀动力学进行比较。
The ion emission of a Sn-based discharge produced extreme ultraviolet producing plasma is characterized with the combined use of different time-of-flight techniques. An electrostatic ion spectrometer is employed to measure the average charge distribution of the emitted Sn ions. A dedicated Faraday cup configuration is used to measure the total ion flux from the source for different discharge energies. High-energy Sn ions emitted by the plasma with energies up to 100 keV have been identified. The number of high-energy ions increases for higher electrical input energy into the plasma while the signal associated with the expanding plasma ions does not show such dependence. The ion energy distribution for a bulk of detected ions is calculated based on the Faraday cup measurements and compared with theoretical plasma expansion dynamics.