Removal of diamond-like carbon film by oxygen-dominated plasma beam converted from filtered carbon-cathodic arc
Removal of diamond-like carbon film by oxygen-dominated plasma beam converted from filtered carbon-cathodic arc
复制标题
过滤碳阴极电弧转化的氧主导等离子束去除类金刚石碳膜
DOI：
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复制
发表时间：
2011
影响因子：
1.5
通讯作者：
H. Yasui
中科院分区：
文献类型：
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作者：
H. Tanoue;M. Kamiya;Y. Suda;S. Oke;H. Takikawa;Y. Hasegawa;M. Taki;N. Tsuji;T. Ishikawa;H. Yasui
