A buckling-based metrology for measuring the elastic moduli of polymeric thin films
A buckling-based metrology for measuring the elastic moduli of polymeric thin films
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DOI：
10.1038/nmat1175
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发表时间：
2004-08-01
期刊：
影响因子：
41.2
通讯作者：
Simonyi, EE
中科院分区：
文献类型：
--
作者：
Stafford, CM;Harrison, C;Simonyi, EE
随着技术朝着更小、更薄和更轻的设备不断发展，对用作扩散屏障、介电涂层、电子封装等的聚合物薄膜提出了更严格的要求。因此，越来越需要测试平台来快速确定聚合物薄膜和涂层的机械性能。在此我们介绍一种巧妙、高效的测量方法，该方法能够快速、定量地得出纳米级聚合物薄膜的弹性模量，且无需昂贵的设备或特定材料的建模。该技术利用了一种在双层结构中出现的屈曲不稳定性，这种双层结构是由涂覆在相对较软、较厚的基底上的一层坚硬的薄膜组成。利用这些高度周期性褶皱的间距，我们通过应用成熟的屈曲力学来计算薄膜的弹性模量。我们成功地将这种新的测量平台应用于多个系统，这些系统的厚度（从纳米到微米）和模量（从兆帕到吉帕）范围很广。
As technology continues towards smaller, thinner and lighter devices, more stringent demands are placed on thin polymer films as diffusion barriers, dielectric coatings, electronic packaging and so on. Therefore, there is a growing need for testing platforms to rapidly determine the mechanical properties of thin polymer films and coatings. We introduce here an elegant, efficient measurement method that yields the elastic moduli of nanoscale polymer films in a rapid and quantitative manner without the need for expensive equipment or material-specific modelling. The technique exploits a buckling instability that occurs in bilayers consisting of a stiff, thin film coated onto a relatively soft, thick substrate. Using the spacing of these highly periodic wrinkles, we calculate the film's elastic modulus by applying well-established buckling mechanics. We successfully apply this new measurement platform to several systems displaying a wide range of thicknessess (nanometre to micrometre) and moduli (MPa to GPa).