Fabrication of mirror templates in silica with micron-sized radii of curvature
Fabrication of mirror templates in silica with micron-sized radii of curvature
复制标题
具有微米级曲率半径的二氧化硅镜子模板的制造
DOI：
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发表时间：
2016
期刊：
影响因子：
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通讯作者：
R. Warburton
中科院分区：
文献类型：
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作者：
D. Najer;Martina Renggli;D. Riedel;S. Starosielec;R. Warburton
我们展示了使用 CO2 激光烧蚀和随后的反应离子蚀刻在熔融石英基底上制造极小半径凹面微光学器件。该协议在浅深度和 2 埃的低表面粗糙度下产生曲率半径 $\lesssim5$ 微米的轴上近高斯凹陷。这种几何形状对于需要小模式体积和低散射损耗的腔量子电动力学很有吸引力。我们研究了可调谐法布里-珀罗型微腔内结构的光学性能，证明了接近涂层限制的损耗率（F = 25,000）和与其几何尺寸一致的小焦距。
We present the fabrication of exceptionally small-radius concave microoptics on fused silica substrates using CO2 laser ablation and subsequent reactive ion etching. The protocol yields on-axis near-Gaussian depressions with radius of curvature $\lesssim5$ microns at shallow depth and low surface roughness of 2 angstroms. This geometry is appealing for cavity quantum electrodynamics where small mode volumes and low scattering losses are desired. We study the optical performance of the structure within a tunable Fabry-Perot type microcavity, demonstrate near-coating-limited loss rates (F = 25,000) and small focal lengths consistent with their geometrical dimensions.