Micro magnetic silicone elastomer membrane actuator
Micro magnetic silicone elastomer membrane actuator
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DOI：
10.1016/s0924-4247(00)00559-8
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发表时间：
2001-04-15
影响因子：
4.6
通讯作者：
Liu, C
中科院分区：
文献类型：
--
作者：
Khoo, M;Liu, C
我们展示了微制造薄膜型磁致动器的设计、制造和测试结果。由电镀坡莫合金 (Ni80Fe20) 制成的磁性件嵌入由有机硅弹性体制成的薄柔性膜中。当施加外部磁场时，磁片上产生的扭矩产生膜位移。 100 微米宽、870 微米长、22 微米厚的坡莫合金片战略性地放置在 2 平方毫米、40 微米厚的聚二甲基硅氧烷 (PDMS) 膜 (Sylgard 184) 中。该设计通过数值模拟进行优化，可实现大膜位移。对该薄膜执行器进行的测试表明，在 2.85 x 10(5) A/m 外部磁场存在的情况下，位移 >80 mum。磁化场越大，位移就可能越大。这种类型的膜致动器可应用于微流体系统中使用的无系留微型泵的制造。 (C) 2001 Elsevier Science B.V. 保留所有权利。
We present results of the design, fabrication, and testing of a microfabricated, membrane-type magnetic actuator. Magnetic pieces made of electroplated Permalloy (Ni80Fe20) are embedded in a thin flexible membrane made of silicone elastomer. When an external magnetic field is applied, a torque generated on the magnetic pieces produces membrane displacement. Permalloy pieces that are 100-mum-wide, 870-mum-long, and 22-mum-thick are strategically positioned in a 2-mm-square, 40-mum-thick polydimethylsiloxane (PDMS) membrane (Sylgard 184). This design, produced through numerical simulations, is optimized to realize large membrane displacements. Tests performed on this membrane actuator showed displacements >80 mum in the presence of a 2.85 x 10(5) A/m external magnetic field. Larger displacements are possible with greater magnetization fields. This type of membrane actuator can be applied to the fabrication of tetherless micropumps for use in microfluidic systems. (C) 2001 Elsevier Science B.V. All rights reserved.