A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans
A scanning probe microscope for magnetoresistive cantilevers utilizing a nested scanner design for large-area scans
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DOI：
10.3762/bjnano.6.46
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发表时间：
2015-02-13
影响因子：
3.1
通讯作者：
Hoelscher, Hendrik
中科院分区：
文献类型：
--
作者：
Meier, Tobias;Foerste, Alexander;Hoelscher, Hendrik
本文描述了一种用于自感隧穿磁阻（TMR）薄膜的原子力显微镜（AFM）。此外，我们通过两个独立压电扫描器的嵌套扫描器设计实现了大扫描范围：扫描范围为5 x 5 x 5 μ m（3）的小型高分辨率扫描器安装在扫描范围为800 x 800 x 35 μ m（3）的大面积扫描器上。为了将AFM杠杆上的TMR传感器表征为偏转传感器，AFM配备有激光束偏转装置以独立地测量杠杆的偏转。该仪器是基于一个商业AFM控制器，能够直接进行大面积扫描，而无需拼接图像。在不同样品上获得的图像，如校准标准、光栅、EPROM芯片、自组装单层膜和金的原子阶跃边缘，证明了嵌套扫描器设计的高稳定性和自感知TMR杠杆的性能。
We describe an atomic force microscope (AFM) for the characterization of self-sensing tunneling magnetoresistive (TMR) cantilevers. Furthermore, we achieve a large scan-range with a nested scanner design of two independent piezo scanners: a small high resolution scanner with a scan range of 5 x 5 x 5 mu m(3) is mounted on a large-area scanner with a scan range of 800 x 800 x 35 mu m(3). In order to characterize TMR sensors on AFM cantilevers as deflection sensors, the AFM is equipped with a laser beam deflection setup to measure the deflection of the cantilevers independently. The instrument is based on a commercial AFM controller and capable to perform large-area scanning directly without stitching of images. Images obtained on different samples such as calibration standard, optical grating, EPROM chip, self-assembled monolayers and atomic step-edges of gold demonstrate the high stability of the nested scanner design and the performance of self-sensing TMR cantilevers.