A wireless microsensor for monitoring flow and pressure in a blood vessel utilizing a dual-inductor antenna stent and two pressure sensors

A wireless microsensor for monitoring flow and pressure in a blood vessel utilizing a dual-inductor antenna stent and two pressure sensors
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一种无线微传感器,利用双电感器天线支架和两个压力传感器监测血管中的流量和压力

DOI:
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发表时间:
2004
期刊:
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
影响因子:
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通讯作者:
Y. Gianchandani
Y. Gianchandani
中科院分区:
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文献类型:
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作者:
Kenichi Takahata;Andrew DeHennis;Kensall D. Wise;Y. Gianchandani

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本文报道了一种微机械天线支架(stentenna),它与植入式微传感器集成,无需电池即可无线感测血流和压力。长度为 20 毫米、直径为 3.5 毫米(膨胀后)的装置是通过使用批量兼容的微电火花加工,由 50 /spl mu/m 厚的不锈钢箔制成的。它与两个尺寸约为 1.4/spl times/1.8/spl times/0.5 mm/sup 3/ 的微机械电容式压力传感器耦合。 0.5-/spl mu/m 厚的聚对二甲苯层提供电绝缘。该集成装置通过标准血管成形术球囊部署在硅胶模拟动脉内。平面结构塑性变形为管状,形成每个 50-60 nH 的双螺旋线圈。这些 L-C 罐用于无线探测通道上两点的压力,以进行流量检测。模拟模拟动脉阻塞的流体实验表明,当流速变化为 150-300 mL/min 时,LC 罐向单独的发射线圈提供的谐振阻抗和相位会移动 5-40 MHz。压力灵敏度为 273 ppm/Torr,比过去的结果高 >100/spl 倍/。
This paper reports a micromachined antenna stent (stentenna) that is integrated with implantable microsensors for wireless sensing of blood flow and pressure with no battery. A device that has 20-mm length and 3.5-mm diameter (after expansion) is fabricated from 50 /spl mu/m thick stainless steel foil by using batch-compatible micro-electro-discharge machining. This is coupled to two micromachined capacitive pressure sensors of approximately 1.4/spl times/1.8/spl times/0.5 mm/sup 3/ dimensions. A 0.5-/spl mu/m thick parylene layer provides electrical insulation. The integrated device is deployed inside a silicone mock artery with a standard angioplasty balloon. The planar structure is plastically deformed to a tubular shape, resulting in dual helical coils with 50-60 nH each. These L-C tanks are used to wirelessly probe pressures at two points along a channel for flow-rate detection. Fluidic experiments that emulate a blockage in the mock artery demonstrate that the resonant impedance and phase provided by the LC-tanks to a separate transmitting coil shift by 5-40 MHz over flow-rate change of 150-300 mL/min. Pressure sensitivity is 273 ppm/Torr, which is >100/spl times/ higher than past results.