Finishing of rectangular microfeatures by localized vibration-assisted magnetic abrasive polishing method
Finishing of rectangular microfeatures by localized vibration-assisted magnetic abrasive polishing method
复制标题
DOI：
10.1016/j.jmapro.2019.11.026
复制
发表时间：
2020-01-01
影响因子：
6.2
通讯作者：
Kang, Renke
中科院分区：
文献类型：
--
作者：
Guo, Jiang;Feng, Wenhe;Kang, Renke
矩形微特征已经被用于光学、微流体和表面工程应用的许多精密机械部件中。近来，诸如切削和铣削的精密加工技术已经越来越多地用于制造这些尺寸为数十至数百微米的微特征。然而，由于可实现的表面质量归因于毛刺和工具痕迹的限制，后抛光工艺成为不可或缺的步骤。对于微特征，形状主导功能，而表面质量影响性能。因此，在不降低形状精度的情况下提高表面质量是抛光微特征的关键挑战。因此，本文提出了一种分析和实验研究的矩形微特征，通过使用局部振动辅助磁性磨料抛光（VAMAP）的方法，旨在实现表面质量的改善，而不恶化的微特征的形式。通过比较不同的磁极和磁体结构，确定了合适的磁场分布。定量评价了磨料的抛光力和寿命。结果表明，该方法适用于铁磁和非铁磁材料的弯曲矩形微特征。加工后的表面质量得到了改善，去除了毛刺和刀痕，同时保持了微特征的形状。
Rectangular microfeatures have been adopted in many precision mechanical components for optics, microfluidics and surface engineering applications. Recently, precision machining technologies such as cutting and milling have been increasingly employed for fabricating these microfeatures in size of tens to hundreds of micrometers. However, due to the limitation of the achievable surface quality attributed to burrs and tool marks, a post polishing process becomes an indispensable step. For microfeatures, form dominates the function while surface quality affects the performance. Therefore, improving surface quality without deteriorating form accuracy is the key challenge to polish microfeatures. Thus, this paper presents an analytical and experimental investigation on finishing of rectangular microfeatures by using localized vibration-assisted magnetic abrasive polishing (VAMAP) method, aiming to achieve surface quality improvement without deteriorating the form of microfeatures. The suitable magnetic field distribution was determined through comparing different configurations of pole and magnet. Polishing force and lifetime of abrasives were quantitatively evaluated. The results demonstrated that the method was applicable to curved rectangular microfeatures for both ferromagnetic and non-ferromagnetic materials. The surface quality was improved that the burrs and tool marks were removed while the form of microfeatures was well maintained.