High-Q factor RF planar microcoils for micro-scale NMR spectroscopy
High-Q factor RF planar microcoils for micro-scale NMR spectroscopy
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DOI：
10.1016/s0924-4247(01)00847-0
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发表时间：
2002-04-01
影响因子：
4.6
通讯作者：
Popovic, RS
中科院分区：
文献类型：
--
作者：
Massin, C;Boero, C;Popovic, RS
我们提出了高Q值射频平面微线圈的设计，制造和测试的核磁共振（NMR）光谱在小体积样品。线圈是用高纵横比SU-8光环氧树脂和电镀铜在玻璃晶片上制作的。晶圆上的电气特性表明，在800 MHz的质量因数高达40。将在300 MHz下测量的品质因数为24的500 μ m直径的微线圈安装在印刷电路板上，并使用铝丝接合进行电接触。将该探针插入7 T超导磁体中，并在单次扫描中获得放置在微线圈上的毛细管中所含的160 nL NMR谱。这项工作是将核磁共振检测集成到微全分析系统（muTAS）的重要一步。(C)2002 Elsevier Science B. V.保留所有权利。
We present the design, fabrication and test of high-Q factor radiofrequency planar microcoils for nuclear magnetic resonance (NMR) spectroscopy in small volume samples. The coils are fabricated on glass wafers using high-aspect ratio SU-8 photoepoxy and copper electroplating. On-wafer electrical characterization shows quality factors up to 40 at 800 MHz. A 500 mum diameter microcoil with a measured quality factor of 24 at 300 MHz is mounted on a printed circuit board and electrically contacted using aluminum wire bonding. This probe is inserted in a 7 T-superconducting magnet, and a H-1-NMR spectrum of 160 nl ethylbenzene contained in a capillary placed over the microcoil is acquired in a single scan. This work is an important step towards the integration of NMR detection into micro-total analysis s' stems (muTAS). (C) 2002 Elsevier Science B.V. All rights reserved.