Growth of novel α-MoO3 hierarchical nanostructured thin films for ethanol sensing

Growth of novel α-MoO3 hierarchical nanostructured thin films for ethanol sensing
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DOI:
10.1016/j.mssp.2020.105263
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发表时间:
2020-12-01
影响因子:
4.1
通讯作者:
Fattah, Ali
Fattah, Ali
中科院分区:
工程技术3区
文献类型:
--
作者:
Farzi-kahkesh, Shaghayegh;Rahmani, Mohammad Bagher;Fattah, Ali

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在本研究中,以四水合七钼酸铵为前驱体,通过易热液技术在玻璃衬底上沉积了具有分层微球形貌的三氧化钼(MoO3)薄膜。利用FESEM、EDS和拉曼光谱、XRD谱图分析和UV-Vis光谱对合成薄膜的形貌、元素组成、晶体结构和光学性能进行了研究。XRD谱图表明形成了具有多晶性质的α - moo3相。拉曼光谱证实了膜是正交的。FESEM显示出具有分层微球结构的薄膜的成功生长。金数字间连接用作制造气体传感器的电极。薄层样品在210-300℃下暴露于不同浓度(100-1000 ppm)的乙醇蒸气中,在260℃的最佳温度下,100 ppm的响应值约为23%,1000 ppm的响应值约为76%。在260℃下,当传感器暴露在最低气体浓度为100 ppm时,其响应时间和恢复时间分别约为111秒和66秒。
In this research, thin films of molybdenum trioxide (MoO3) with hierarchical microsphere morphology were deposited on glass substrates via the facile hydrothermal technique, using ammonium heptamolybdate tetra hydrate as a precursor. The morphology, elemental composition, crystal structure and optical properties of the synthesized thin films were studied using FESEM, EDS and Raman spectroscopy, XRD pattern analysis and UV-Vis spectroscopy, respectively. The XRD pattern indicates the formation of the alpha-MoO3 phase with a polycrystalline nature. Raman spectra confirm that the films are orthorhombic. FESEM exhibits the successful growth of thin films with a hierarchical microsphere structure. The gold interdigital connection employed as an electrode for the fabrication of the gas sensor. The thin layer sample was exposed to various concentrations (100-1000 ppm) of ethanol vapor at 210-300 degrees C. The response values at an optimum temperature of 260 degrees C were recorded to be about 23% for 100 ppm and 76% for 1000 ppm of ethanol vapor. The response and the recovery times of the sensor at 260 degrees C, when it was exposed to the lowest gas concentration of 100 ppm, were recorded to be about 111 and 66 s, respectively.