Differential Pressure Sensor Using Integrated Optical MEMS and Double Ring Resonator
Differential Pressure Sensor Using Integrated Optical MEMS and Double Ring Resonator
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DOI：
10.1109/wrap.2017.8468585
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发表时间：
2017-12
期刊：
影响因子：
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通讯作者：
Ravali Pampala;V. Kolli;T. Srinivas
中科院分区：
文献类型：
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作者：
Ravali Pampala;V. Kolli;T. Srinivas
本文设计并模拟了一种差压传感器，该传感器采用半径分别为5μm和4μm的双环谐振腔，谐振腔安装在尺寸为100μm × 30μm × 5μm的悬臂梁上。在悬臂梁上产生的应力改变了波导中的折射率，从而导致谐振波长的偏移。灵敏度为15.544pm/kPa。该传感器工作波长为1.55μm，可用于航空、医学和汽车等领域。
In this work, we designed and simulated a differential pressure sensor using a double ring resonator with radius 5μm and 4μm placed on the fixed of a cantilever beam with dimensions 100μm × 30μm x 5μm. The stress induced on the cantilever changes the refractive index in the waveguide which results in the shift of the resonant wavelength. A sensitivity of 15.544pm/kPa is achieved. The sensor is operated at wavelength equal to 1.55μm and can be used for aircraft, medicine and automobile.