Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors
Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors
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DOI：
10.1016/j.ijhydene.2018.03.149
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发表时间：
2018-05-10
影响因子：
7.2
通讯作者：
Ikehashi, Tamio
中科院分区：
文献类型：
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作者：
Hayashi, Yumi;Yamazaki, Hiroaki;Ikehashi, Tamio
在这项研究中，我们研究了 PdCuSi 金属玻璃 (MG) 作为电容式 MEMS 氢传感器的传感材料。我们首先通过薄膜分析证实所制备的PdCuSi薄膜是MG并且具有三棱柱簇。 PdCuSi MG 的压力-成分-温度曲线在吸氢和解吸过程中没有表现出滞后现象。与 Pd 多晶相比，响应时间快了两个数量级。这些特性归因于三棱柱簇。在 0.05 vol% 至 4.0 vol% 的低氢浓度范围内评估应变，发现 PdCuSi MG 的应变很好地遵循西弗茨定律，表明氢以扩散状态存在于 MG 中。测量了电容式 MEMS 氢气传感器的氢气浓度依赖性，并获得了无滞后特性，这表明其在氢气泄漏检测应用中具有优势。 (C) 2018 氢能源出版物有限责任公司。由爱思唯尔有限公司出版。保留所有权利。
In this study, we investigated PdCuSi metallic glass (MG) as a sensing material for capacitive MEMS hydrogen sensors. We first confirmed by film analysis that the fabricated PdCuSi film was MG and that it had a trigonal prism cluster. The measured pressure-composition-temperature curve of PdCuSi MG exhibited no hysteresis during hydrogen absorption and desorption. The response time was found to become faster by two orders of magnitudes compared with that of Pd polycrystal. These properties were attributed to the trigonal prism clusters. Strain was evaluated in the low hydrogen concentration regime of 0.05 vol% to 4.0 vol%, and the strain of PdCuSi MG was found to follow Sieverts' law well, indicating that hydrogen is present in the MG in a diffuse state. The hydrogen-concentration dependence of a capacitive MEMS hydrogen sensor was measured and hysteresis-free characteristics were obtained, implying advantages in hydrogen leak detection applications. (C) 2018 Hydrogen Energy Publications LLC. Published by Elsevier Ltd. All rights reserved.