Transparent capacitors based on nanolaminate Al2O3/TiO2/Al2O3 with H2O and O3 as oxidizers
Transparent capacitors based on nanolaminate Al2O3/TiO2/Al2O3 with H2O and O3 as oxidizers
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DOI：
10.1063/1.4872470
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发表时间：
2014-04-21
影响因子：
4
通讯作者：
Liu, C.
中科院分区：
文献类型：
--
作者：
Zhang, G. Z.;Wu, H.;Liu, C.
采用原子层沉积法在石英玻璃上制备了纳米Al 2 O3/TiO 2/Al 2 O3（ATA）复合叠层透明电容器。在1 kHz下获得了14 fF/μ m（2）的最大电容密度。此外，以O-3为氧化剂，在1V时实现了2.1 × 10 ~（-9）A/cm ~ 2的超低漏电流密度。在高场下，Fowler-Nordheim隧穿是漏电流的主要机制，而在低场下，多种导电机制共存。AlZnO/ATA/AlZnO透明电容器在可见光范围内表现出超过80%的平均光学透射率，这是集成在透明电路中的良好候选者。(C)2014 AIP出版有限责任公司。
Transparent capacitors with nanolaminate Al2O3/TiO2/Al2O3 (ATA) hybrid dielectrics have been prepared on quartz glass by atomic layer deposition. The maximal capacitance density of 14 fF/mu m(2) at 1 kHz was obtained. Moreover, an ultralow leakage current density of 2.1 x 10(-9) A/cm(2) at 1V was realized by using O-3 as the oxidizer. Fowler-Nordheim tunneling is the main mechanism of the leakage current at high fields, while several conduction mechanisms coexist at low fields. The AlZnO/ATA/AlZnO transparent capacitors exhibit an average optical transmittance of more than 80% in the visible range, which serve as good candidates for integration in transparent circuits. (C) 2014 AIP Publishing LLC.