Sensitivity analyses of the thermophysical properties of silicon melt and crystal
Sensitivity analyses of the thermophysical properties of silicon melt and crystal
复制标题
硅熔体和晶体热物理性质的敏感性分析
DOI：
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发表时间：
2005
期刊：
影响因子：
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通讯作者：
N. Imaishi
中科院分区：
文献类型：
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作者：
M. Mito;T. Tsukada;M. Hozawa;C. Yokoyama;You;N. Imaishi
基于一个简单的、层流的、轴对称的、准稳态的小型硅直拉炉模型，进行了一组全局数值模拟，以揭示熔体和晶体的热物理性质对无量纲拉晶速率的影响，即，Peclet数Pe和熔体/晶体界面的偏转Δz，用于性能的敏感性分析。这里研究的性质是表面张力，粘度，导热系数，熔体的热膨胀系数和发射率的温度系数，以及晶体的导热系数和发射率。结果表明，在熔体的热物理性质中，发射率对Pe和Δz相对敏感。在晶体性质方面，热导率对Pe更敏感，而发射率对Δz更敏感。
A set of global numerical simulations based on a simple, laminar, axisymmetric and pseudo steady model of a small silicon CZ furnace was conducted to reveal the influences of the thermophysical properties of the melt and crystal on the non-dimensional crystal pulling rate, i.e., the Peclet number Pe, and the deflection of the melt/crystal interface Δz, for the sensitivity analyses of the properties. The properties investigated here are the temperature coefficient of surface tension, viscosity, thermal conductivity, the thermal expansion coefficient and emissivity of the melt, and the thermal conductivity and emissivity of the crystal. The results demonstrated that, concerning the thermophysical properties of the melt, emissivity is relatively sensitive to Pe and Δz. Concerning the crystal properties, thermal conductivity is more sensitive to Pe, while emissivity is more sensitive to Δz.