Optical Fiber Humidity Sensor With Porous TiO2/SiO2/TiO2 Coatings on Fiber Tip
Optical Fiber Humidity Sensor With Porous TiO2/SiO2/TiO2 Coatings on Fiber Tip
复制标题
DOI：
10.1109/lpt.2015.2426726
复制
发表时间：
2015-07
影响因子：
2.6
通讯作者：
Chujia Huang;Weijing Xie;Dongwen Lee;C. Qi;Minghong Yang;Min Wang;Jianguan Tang
中科院分区：
文献类型：
--
作者：
Chujia Huang;Weijing Xie;Dongwen Lee;C. Qi;Minghong Yang;Min Wang;Jianguan Tang
提出并优化了一种多孔氧化膜多模光纤湿度传感器。相对湿度（RH）传感与多孔涂层暴露于不同RH环境时有效折射率的变化引起的干涉条纹的偏移有关。提出了一种解释传感原理的光干涉模型，并对真空度、烘烤温度等制作工艺进行了验证。实验结果表明，该传感器的平均灵敏度为0.7nm/%RH（3.3%RH~63%RH），重复性好，迟滞小，对中低湿度的测量具有很高的灵敏度。
A multimode optical fiber humidity sensor composed of porous oxide films is demonstrated and optimized. Relative-humidity (RH) sensing is correlated with the shift of interference fringe due to the change of effective refractive index of porous coatings when exposed to different RH environments. An optical interference model that explains the sensing principle is presented, and the fabrication process, such as vacuum degree, baking temperature, is verified. Experimental results show that the average sensitivity is 0.7 nm/%RH (3.3%RH~63%RH), the proposed sensors present high repeatability, little hysteresis, and especially highly sensitive to low and middle moisture measure.