Analysis of copper surface features obtained using TEA CO2 laser at reduced air pressure
Analysis of copper surface features obtained using TEA CO2 laser at reduced air pressure
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使用 TEA CO2 激光器在减压下获得的铜表面特征分析
DOI：
10.1016/j.apsusc.2013.01.067
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发表时间：
2013
影响因子：
6.7
通讯作者：
M. Kuzmanovic
中科院分区：
文献类型：
--
作者：
M. Momčilović;M. Trtica;J. Ciganovic;J. Savović;J. Stašić;M. Kuzmanovic
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Interaction of a transversely excited atmospheric (TEA) CO2laser with rough copper surface, at reduced air pressure, was studied. Optical pulse duration of the laser employed was ∼2μs, with the initial spike FWHM of ∼100ns. Laser energy density of ∼32J/cm2(intensity ∼108W/cm2) was above the plasma ignition threshold. Morphological features of the copper can be summarized as follows: (i) superficial damages, which take crater-shaped form at a higher number of accumulated laser pulses, (ii) development of melt pools with visible bubbles inside the damage region, (iii) formation of solid droplets at near periphery, and (iv) presence of “halo” effect at the irradiated surface. The laser induced surface changes were influenced by the target plasma formation. The formation of plasma influenced the laser–target interaction in two opposite ways: trough absorption of laser energy by the plasma, i.e. trough the effect of plasma shielding, and trough energy transfer from the plasma to the sample. Optical emission spectra were compared for laser induced plasma originated by a single and by cumulative laser pulses. It was found that plasma dimensions and emission intensities have a strong correlation with the number of accumulated laser pulses. Enhancement of both atomic and ionic copper lines was registered when laser induced plasma originated from a single pulse. Chemical analysis of the surface showed a tendency of copper content increase and oxygen content reduction when going from non-irradiated region to the central irradiated region. In the central damage zone, nearly pure copper was present which can be advantageous for some applications due to considerably lower contamination.