On the performance of PVDF based piezoelectric sensor with microstructures
On the performance of PVDF based piezoelectric sensor with microstructures
复制标题
DOI：
10.1117/12.2658072
复制
发表时间：
2023-04
期刊：
影响因子：
--
通讯作者：
Rishikesh Srinivasaraghavan Govindarajan;T. Stark;F. Madiyar;Daewon Kim
中科院分区：
文献类型：
--
作者：
Rishikesh Srinivasaraghavan Govindarajan;T. Stark;F. Madiyar;Daewon Kim
本文旨在研究具有不同形状的3D打印微结构的压电传感器的性能。基于时频域的数值分析，使用高分辨率双光子聚合方法将微结构直接打印在具有较高压电系数的PVDF透明薄膜上。通过使用3D打印的模板将金溅射到基底表面来制造双向金叉指换能器（IDTs）。使用纳米压痕仪和3D轮廓仪检测薄膜的机械性能和打印微结构的表面形态。使用网络分析仪测量由于微结构引起的频率响应变化。这项研究将为开发一种具有更高灵敏度的高效基于波的气体传感器提供参考。
This paper aims to investigate the performance of piezoelectric sensors with different shapes of 3D-printed microstructures. Based on the numerical analysis in the time-frequency domain, the microstructures are printed directly on the PVDF transparent film exhibiting higher piezoelectric coefficients using a high-resolution two-photon polymerization method. Bi-directional gold IDTs are fabricated by sputtering gold onto the substrate surface using a 3D-printed stencil. The mechanical properties of the film and surface morphology of printed microstructures are examined using a nanoindenter and a 3D profilometer. The change in frequency response due to the microstructure is measured using a network analyzer. This study will be a reference for developing an efficient wave-based gas sensor with enhanced sensitivity.