A Micromachined Pb(Mg1/3Nb2/3)O3-PbTiO3 Single Crystal Composite Circular Array for Intravascular Ultrasound Imaging.
A Micromachined Pb(Mg1/3Nb2/3)O3-PbTiO3 Single Crystal Composite Circular Array for Intravascular Ultrasound Imaging.
复制标题
DOI：
10.1115/1.4041443
复制
发表时间：
2019-05-01
期刊：
影响因子：
--
通讯作者：
Jiang, Xiaoning
中科院分区：
文献类型：
--
作者：
Li, Sibo;Tian, Jian;Jiang, Xiaoning
本文介绍了微机械高频 Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) 单晶/环氧树脂 1-3 复合超声圆形阵列的设计、制造和表征。 1-3复合材料是通过PMN-PT单晶的深反应离子蚀刻（DRIE）制备的。单晶柱的特征尺寸为直径18μm。柱子之间的缝隙小于4毫米。将节距为 100μm 的 50 元件圆形阵列传感器（径向向外）缠绕在针上，导致外径为 1.7mm。阵列测试表明中心频率达到39±2 MHz，-6dB分数带宽为82±6%。插入损耗为-41 dB，相邻元件之间的串扰为-24 dB。使用幻像线（D=50μm）进行径向向外成像测试。该图像采用合成孔径法，动态范围为 30 dB，可显示 6 毫米的穿透深度。 -6dB 波束宽度估计为轴向 60μm，距离探头 3.1mm。结果表明，40 MHz 微机械 1-3 复合圆形阵列在血管内超声 (IVUS) 成像应用中很有前景。
This paper describes the design, fabrication, and characterization of a micromachined high-frequency Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) single crystal/epoxy 1-3 composite ultrasound circular array. The 1-3 composites were fabricated by deep reactive ion etching (DRIE) of PMN-PT single crystal. The feature size of single crystal pillars was 18 mum in diameter. The kerf between pillars was less than 4 mum. A 50-element circular array transducer (radially outward) with the pitch of 100 mum was wrapped around a needle resulting in an outer diameter of 1.7 mm. The array test showed that the center frequency reached 39±2 MHz and -6-dB fractional bandwidth was 82±6%. The insertion loss was -41 dB, and crosstalk between adjacent elements was -24 dB. A radial outward imaging testing with phantom wires (D = 50 mum) was conducted. The image was in a dynamic range of 30 dB to show a penetration depth of 6 mm by using the synthetic aperture method. The -6-dB beam width was estimated to be 60 mum in the axial direction at 3.1 mm distance away from the probe. The results suggest that the 40 MHz micromachined 1-3 composite circular array is promising for intravascular ultrasound (IVUS) imaging applications.