Automated Four-Point Probe Measurement of Nanowires Inside a Scanning Electron Microscope
Automated Four-Point Probe Measurement of Nanowires Inside a Scanning Electron Microscope
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DOI：
10.1109/tnano.2010.2065236
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发表时间：
2011-07-01
影响因子：
2.4
通讯作者：
Cotton, Ian
中科院分区：
文献类型：
--
作者：
Ru, Changhai;Zhang, Yong;Cotton, Ian
扫描电子显微镜（SEM）内的纳米操纵已被用于操纵和表征纳米材料。尽管最近在自动化纳米操纵方面做出了努力，但它在很大程度上仍然是手动进行的。在本文中，我们展示了自动nanomanipulation内的SEM结构良好的nanomanipulation任务，通过视觉伺服控制和基于视觉的接触检测方法，使用SEM作为视觉传感器。通过控制四个具有SEM视觉反馈的纳米操纵器自动实现单个纳米线的四点探针测量。前馈控制器被并入控制系统以改善响应时间。该技术代表了SEM内部纳米操纵的进步，并可以扩展到其他纳米操纵任务。
Nanomanipulation inside a scanning electron microscope (SEM) has been employed to maneuver and characterize nanomaterials. Despite recent efforts toward automated nanomanipulation, it is still largely conducted manually. In this paper, we demonstrate automated nanomanipulation inside an SEM for a well-structured nanomanipulation task via visual servo control and a vision-based contact-detection method using SEM as a vision sensor. Four-point probe measurement of individual nanowires is achieved automatically by controlling four nanomanipulators with SEM visual feedback. A feedforward controller is incorporated into the control system to improve response time. This technique represents an advance in nanomanipulation inside SEM and can be extended to other nanomanipulation tasks.