Atomic force microscopy using voice coil actuators for vibration isolation
Atomic force microscopy using voice coil actuators for vibration isolation
复制标题
使用音圈致动器进行隔振的原子力显微镜
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
G. Schitter
中科院分区：
文献类型：
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作者：
S. Ito;Daniel Neyer;S. Pirker;Jürgen Steininger;G. Schitter
本文提出了一种与原子力显微镜（AFM）内部驱动器集成的隔振系统，用于垂直移动探针。对于运动，音圈致动器（洛伦兹致动器）由低刚度挠曲件引导。由于刚度低，从地板到探头的振动在高频下被解耦。为了抑制残余振动，AFM探针通过使用位移传感器来跟踪AFM样品。通过专门针对洛伦兹致动器的机械和控制设计，垂直运动具有比第一机械共振高24倍的控制带宽以抑制振动。作为隔振性能的演示，凹坑和轨道的光盘成功地成像没有外部隔振器。
This paper presents a vibration isolation system integrated with the internal actuators of an atomic force microscope (AFM) to vertically move the probe. For the motion, voice coil actuators (Lorentz actuators) are guided by low-stiffness flexures. Due to the low stiffness, the vibrations from the floor to the probe are decoupled at high frequencies. To reject the residual vibrations, the AFM probe tracks the AFM sample by using a displacement sensor. By mechanical and control design specifically for Lorentz actuators, the vertical motion has a control bandwidth that is 24 times higher than the first mechanical resonance to reject vibrations. As a demonstration of the vibration isolation performance, pits and tracks of a CD-ROM are successfully imaged without an external vibration isolator.