Formation of various-axes-oriented wurtzite nuclei and enlargement of the a-axis-oriented region in AlFeN films deposited on Si(100) substrates
Formation of various-axes-oriented wurtzite nuclei and enlargement of the a-axis-oriented region in AlFeN films deposited on Si(100) substrates
复制标题
Si(100) 衬底上沉积的 AlFeN 薄膜中多轴取向纤锌矿核的形成和 a 轴取向区域的扩大
DOI：
10.1039/d0ma01026j
复制
发表时间：
2021
影响因子：
5
通讯作者：
Tamenori Yusuke
中科院分区：
文献类型：
--
作者：
Imada Saki;Isshiki Toshiyuki;Tatemizo Nobuyuki;Nishio Koji;Mamishin Shuichi;Suzuki Yuya;Ito Katsuji;Nitta Kiyofumi;Sekizawa Oki;Suga Hiroki;Tamenori Yusuke
采用射频溅射法在Si（100）衬底上制备了高Fe浓度的纤锌矿AlN薄膜，并对薄膜的生长过程进行了研究。X射线衍射（XRD）分析表明，厚膜（~ 2.5 μm）具有非极性的a轴取向，与沉积在SiO2玻璃衬底上的薄膜相似。通过粉末XRD分析，发现在沉积的初始阶段期间形成非纤锌矿细晶体和/或非晶材料，随后是具有各种轴取向（例如a、m和r取向）的纤锌矿成核。XRD结果还表明，a轴取向区域随着膜厚度的增加而急剧增加。扫描透射电子显微镜（STEM）和能量色散X射线光谱分析表明，非纤锌矿细晶材料的候选者之一是γ-Al 2 O3。STEM分析还表明，a轴取向的单晶颗粒生长从随机取向的小纤锌矿颗粒，随着沉积时间的增加，直径增加。Al K边X射线吸收近边结构的结果表明，位于膜平面中的纤锌矿的极性c轴方向上的电子结构随着沉积时间而发展，从而进一步支持XRD和STEM分析的结果。
Wurtzite AlN films with high Fe concentrations were deposited on Si(100) substrates using radio-frequency sputtering, and the growth process was investigated. X-Ray diffraction (XRD) analysis with parallel incident X-rays showed that a thick film (∼2.5 μm) had a non-polar a-axis orientation, similar to the films deposited on SiO2 glass substrates. Through powder XRD analysis, it was found that non-wurtzite fine crystals and/or amorphous materials formed during the initial stage of deposition, followed by wurtzite nucleation with various orientations of the axes, such as a, m, and r orientations. The XRD results also implied that the a-axis-oriented regions drastically increased with increasing film thickness. Scanning transmission electron microscopy (STEM) and energy-dispersive X-ray spectroscopy analyses suggested that one of the candidates for the non-wurtzite fine crystalline material was γ-Al2O3. STEM analysis also demonstrated that a-axis-oriented single-crystal grains grew from randomly oriented small wurtzite grains that increased in diameter with increasing deposition time. Al K-edge X-ray absorption near-edge structure results suggested that the electronic structure in the polar c-axis direction of wurtzite lying in the film plane developed with deposition time, thereby further supporting the findings of the XRD and STEM analyses.