New Technique of the X-Ray Efficiency Measurement of a Charge-Coupled Device with a Subpixel Resolution
New Technique of the X-Ray Efficiency Measurement of a Charge-Coupled Device with a Subpixel Resolution
复制标题
亚像素分辨率电荷耦合器件X射线效率测量新技术
DOI：
10.1143/jjap.36.2906
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发表时间：
1997
影响因子：
1.5
通讯作者：
S. Kitamoto
中科院分区：
文献类型：
--
作者：
H. Tsunemi;K. Yoshita;S. Kitamoto
我们报告了使用一种新技术来测量具有亚像素分辨率的电荷耦合器件 (CCD) 的 X 射线检测效率。新技术利用平行 X 射线束和放置在 CCD 前面的金属网。我们使用的CCD相机是使用TC213（日本德州仪器（TIJ））的传统系统，其像素尺寸为12μm×12μm，具有100万像素。该网格有 4 µm 直径的孔，间隔为 12 µm。我们在典型像素内制作了一张效率图，详细显示了门结构：虚拟门、时钟门和防晕门。我们测量的闸门结构与厂家设计值一致。通过选择单个像素事件，我们检测到像素边界。还将讨论其他应用计划。
We report the use of a new technique to measure the X-ray detection efficiency of a charge-coupled device (CCD) with subpixel resolution. The new technique makes use of a parallel X-ray beam and metal mesh placed just in front of the CCD. The CCD camera we used is a conventional system using the TC213 (Texas Instrument Japan (TIJ)) whose pixel size is 12 µ m ×12 µ m with one million pixels. The mesh has 4 µm diameter holes spaced at 12 µm intervals. We produced an efficiency map within a typical pixel showing the gate structure in detail: a virtual gate, a clock gate and an antiblooming gate. The gate structure we measured is consistent with the manufacturer's design value. By selecting single pixel events, we detected a pixel boundary. Additional plans for application will also be discussed.