Room temperature bonding of micromachined glass devices for capillary electrophoresis
Room temperature bonding of micromachined glass devices for capillary electrophoresis
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DOI：
10.1016/s0925-4005(00)00351-8
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发表时间：
2000-05-15
影响因子：
8.4
通讯作者：
Harrison, DJ
中科院分区：
文献类型：
--
作者：
Chiem, N;Lockyear-Shultz, L;Harrison, DJ
我们报告了一种用于微流控应用的简单的室温粘合玻璃的方法，该方法基于严格的清洁[K.Fluri，G.Fitzpatrick，N.Chiem，D.J.Harrison，集成毛细管电泳仪和高效的柱后反应器，在平面石英和玻璃芯片中，肛门。化学。68(1996)4285-4290；N.Chiem，D.J.哈里森，微芯片毛细管，肛门。化学。69(1997)373-378；D.Sobek，A.M.Young，M.L.Gray，S.D.Senturia，用于光学测量的微型流动腔，Proc.IEEE微型机电系统研讨会，佛罗里达州劳德代尔堡，1993年2月7日至10日，第219-224页。]在粘合前对玻璃基板进行表面处理。在20摄氏度接触的微机械玻璃基板上施加的低压力提供了牢固结合的器件。这些设备能够承受常规操作，并可用于毛细管电泳长达2年。在6-8千伏的电压下观察到高达90,000块理论板的分离效率，与在440-650℃结合的器件中观察到的100,000块分离效率相当。多种相同或不同类型的商业可用玻璃无需热处理即可粘合，从而减少了对玻璃之间热膨胀系数良好匹配的需求。(C)2000 Elsevier Science S.A.保留所有权利。
We report a simple method to bond glass at room temperature for microfluidic applications, which is based on rigorous cleaning [K. Fluri, G. Fitzpatrick, N. Chiem, D.J. Harrison, integrated capillary electrophoresis devices with an efficient postcolumn reactor in planar quartz and glass chips, Anal. Chem. 68 (1996) 4285-4290; N. Chiem, D.J. Harrison, Microchip-based capillary, Anal. Chem. 69 (1997) 373-378; D. Sobek, A.M. Young, M.L. Gray, S.D. Senturia, A microfabricated flow chamber for optical measurements influids, Proc. IEEE Micro-Electromechanical Systems Workshop, Fort Lauderdale, FL, Feb 7-10, 1993, pp. 219-224.] of the glass substrates before bonding. Low applied pressure on micromachined glass substrates contacted at 20 degrees C provides devices, which are robustly bonded. These devices are able to withstand routine handling, and be used for capillary electrophoresis for as long as 2 years. Separation efficiencies as high as 90,000 theoretical plates were observed at 6-8 kV applied, comparable to 100,000 observed in devices bonded at 440-650 degrees C. A wide range of the same or different types of commercially available glass can be bonded without heat treatment, alleviating the need for a good match in thermal expansion coefficients between the glasses. (C) 2000 Elsevier Science S.A. All rights reserved.