MEMS-Enabled On-Chip Computational Mid-Infrared Spectrometer Using Silicon Photonics
MEMS-Enabled On-Chip Computational Mid-Infrared Spectrometer Using Silicon Photonics
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DOI：
10.1021/acsphotonics.2c00381
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发表时间：
2022-06-23
期刊：
影响因子：
7
通讯作者：
Zhou, Guangya
中科院分区：
文献类型：
--
作者：
Qiao, Qifeng;Liu, Xinmiao;Zhou, Guangya
使用硅光子学的片上光谱仪为集成和便携式应用场景中的生化光谱和高光谱成像提供了紧凑、节能且经济高效的解决方案。中红外 (MIR) 光谱带对于光谱传感至关重要。然而，现有的片上光谱仪方法在 MIR 方面受到限制。在这里，我们展示了一种使用 MEMS 硅光子集成器件的 MIR（3.7-4.05 μm）片上计算光谱仪，该器件通过可重构波导耦合器的时域调制来实现。静电驱动片上光谱仪本质上具有低功耗和单像素检测的特点，并具有多重优势，可能会带来高信噪比。我们通过实验实现了大带宽（350 nm）的激光光谱重建。此外，基于线性叠加假设，我们使用正则化回归方法实现了一氧化二氮气体的窄光谱特征（3 nm分辨率）和宽吸收光谱的多色光重建。
On-chip spectrometers using silicon photonics offer a compact, energy-efficient, and cost-effective solution to biochemical spectroscopy and hyperspectral imaging in integrated and portable application scenarios. The mid-infrared (MIR) spectral band is critical to spectroscopic sensing. However, the existing on-chip spectrometer approaches are limited in the MIR. Here, we present an on-chip computational spectrometer in MIR (3.7-4.05 mu m) using an MEMS-enabled silicon photonic integrated device, which is realized via the time-domain modulation of reconfigurable waveguide couplers. The electrostatically actuated on-chip spectrometer intrinsically features low power consumption and single-pixel detection and offers multiplexing advantages, potentially leading to a high signal-to-noise ratio. We achieve laser spectrum reconstruction across a large bandwidth (350 nm) experimentally. Furthermore, based on a linear superposition assumption, we achieve the polychromatic light reconstruction of narrow spectral features (3 nm resolution) and a broad absorption spectrum of nitrous oxide gas using a regularized regression method.