Self-consistent particle simulation of radio-frequency CF4 discharge with implementation of all ion–neutral reactive collisions
Self-consistent particle simulation of radio-frequency CF4 discharge with implementation of all ion–neutral reactive collisions
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DOI：
10.1116/1.581259
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发表时间：
1998-10
期刊：
影响因子：
--
通讯作者：
K. Denpoh;K. Nanbu
中科院分区：
文献类型：
--
作者：
K. Denpoh;K. Nanbu
用粒子模拟/蒙特卡罗方法研究了平行电极间CF 4射频放电的结构。基于最可靠的碰撞数据执行模拟，即，详细的横截面数据的电子CF 4碰撞，测量率的正负离子复合，和新开发的离子CF 4碰撞模型的吸热反应。正离子（特别是CF 3+）和CF 4分子之间的反应碰撞被发现是重要的。负离子的主要损失过程是与正离子的复合。放电的维持机制是离子化，而不是电子从负离子中脱离。
The structures of the CF4 radio-frequency discharge between parallel electrodes are clarified by the use of the particle-in-cell/Monte Carlo method. The simulation is performed based on the most reliable collision data, i.e., detailed cross-section data for electron–CF4 collision, measured rate for positive–negative ion recombination, and the newly developed ion–CF4 collision model for endothermic reactions. Reactive collisions between positive ions (especially CF3+) and CF4 molecules are found to be important. The major loss process of negative ions is the recombination with positive ions. It is also found that the discharge sustaining mechanism is the ionization, not the electron detachment from negative ions.